What Are the Applications of DRIE in Nanotechnology?
DRIE is critical in the development of a wide range of nano-scale devices and structures:
MEMS and NEMS: Used in the fabrication of sensors, actuators, and other micro and nano-electromechanical systems. Microfluidics: Essential for creating channels and chambers in lab-on-a-chip devices. Photonics: Used in the manufacture of optical waveguides, photonic crystals, and other photonic components. Nanostructures: Enables the creation of nano-pillars, nano-holes, and other intricate nanostructures.
