How Is DRIE Different from Other Etching Techniques?
Compared to other etching techniques, DRIE offers unique advantages for nano-scale fabrication:
Wet Etching: While wet etching is simpler and less expensive, it lacks the precision and anisotropy of DRIE. Standard RIE: Standard RIE provides good anisotropy but cannot achieve the same depth and aspect ratios as DRIE. Laser Ablation: Laser ablation is useful for certain applications but lacks the fine control and feature resolution of DRIE.
