What are the applications of PA-ALD in Nanotechnology?
PA-ALD is critical in various nanotechnology applications such as:
Semiconductor Industry: Used for depositing gate oxides, high-k dielectrics, and metal interconnects in integrated circuits. Energy Storage: Applied in the fabrication of thin-film batteries and supercapacitors. Catalysis: Utilized for creating highly active and stable catalyst layers. Medical Devices: Used for coating implants and biosensors to improve biocompatibility and functionality.
