Why is Reactive Sputtering Important in Nanotechnology?
Reactive sputtering is pivotal in nanotechnology for several reasons:
1. Versatility: It enables the deposition of a wide range of compound materials such as oxides, nitrides, and carbides. 2. Precision: The process allows for precise control over film composition and thickness at the nanoscale. 3. Quality: It produces films with excellent adhesion, uniformity, and smoothness, which are essential for nanoelectronics and nanophotonics. 4. Scalability: It is suitable for both small-scale research and large-scale industrial applications.
