What are the Applications of Reactive Sputtering in Nanotechnology?
Reactive sputtering is used in a variety of nanotechnology applications, including:
1. Semiconductor Devices: It is used to deposit dielectric layers and metal gate stacks in transistors. 2. Optical Coatings: It enables the fabrication of anti-reflective coatings and mirror coatings with precise optical properties. 3. Sensors: It is employed in creating sensitive films for gas sensors and biosensors. 4. Protective Coatings: It provides hard, wear-resistant coatings for MEMS devices and other nanoscale mechanical systems.
