What Tools and Techniques are Used for Calibration?
Various tools and techniques are employed for probe calibration, such as:
Calibration Gratings: These are specially designed surfaces with known dimensions used to calibrate the lateral and vertical measurement capabilities of the probe. Reference Standards: Materials with well-defined properties that serve as benchmarks for calibration. Interferometry: A precise technique that uses the interference of light waves to measure the probe's displacement and alignment.
