RIE is highly versatile and can etch a wide range of materials. Commonly etched materials include: - Silicon: Widely used in semiconductor devices and MEMS. - Silicon Dioxide: Often used as an insulating layer. - Silicon Nitride: Employed in various electronic and photonic applications. - Metals: Such as aluminum, copper, and gold, used in interconnects and sensors. - Polymers: Applied in the fabrication of nanoimprint lithography molds and biomedical devices.
