Various materials are used to create high purity films, depending on the application. Common materials include:
- Metals: Gold, silver, and platinum are often used for their excellent electrical and thermal properties. - Oxides: Materials like titanium dioxide (TiO₂) and silicon dioxide (SiO₂) are used for their insulating and optical properties. - Nitrides and Carbides: Silicon nitride (Si₃N₄) and silicon carbide (SiC) are used for their hardness and chemical resistance.
