Several techniques are employed for beam alignment in nanotechnology:
Optical Microscopy: Used for coarse alignment of beams, particularly in scanning electron microscopes (SEMs). Electron Optics: Utilizes electromagnetic lenses to focus and align electron beams, crucial for transmission electron microscopy (TEM). Feedback Systems: Advanced systems use real-time feedback for dynamic alignment adjustments, enhancing the precision of fabrication and measurement processes. Alignment Markers: Physical markers on the sample substrate help in aligning beams accurately in lithography and other processes.
