The control of linewidth is essential for several reasons:
Performance: The electrical and optical properties of nano-devices are highly dependent on the linewidth. Smaller linewidths can lead to faster and more efficient devices. Integration Density: Reducing the linewidth enables higher integration densities, which is crucial for advancing integrated circuits and other complex nanostructures. Manufacturing Precision: Achieving consistent linewidths requires precise control over the fabrication process, affecting yield and reproducibility.
