Linewidth can be measured using various techniques, including:
Scanning Electron Microscopy (SEM): SEM is commonly used to measure linewidth due to its high resolution and accuracy. Atomic Force Microscopy (AFM): AFM provides topographical information with nanometer-scale resolution, making it suitable for linewidth measurement. Optical Microscopy: Though limited by the diffraction limit, advanced optical techniques can sometimes be used for measuring larger linewidths.
