Several techniques are employed to measure and analyze residual gases in a vacuum system:
Mass Spectrometry: This technique is widely used to identify and quantify the different types of gases present in a vacuum chamber. Quadrupole Mass Analyzer: This device allows for the detection of specific gas species based on their mass-to-charge ratio. Residual Gas Analyzer (RGA): An RGA can continuously monitor the composition of the residual gases in real-time.
