Several techniques are employed to analyze thin films, each offering unique advantages:
Ellipsometry: Measures film thickness and refractive index by analyzing the change in polarization of light reflected from the film surface. X-ray Diffraction (XRD): Provides information on the crystalline structure, phase identification, and grain size of thin films. Atomic Force Microscopy (AFM): Offers high-resolution imaging and surface topography analysis. Scanning Electron Microscopy (SEM): Provides detailed images of the film surface morphology and composition. Spectroscopic Techniques: Such as X-ray Photoelectron Spectroscopy (XPS) and Auger Electron Spectroscopy (AES), offer surface composition and chemical state information.
