Thin film thickness can be measured using various techniques:
Ellipsometry: Non-destructive optical method that can measure thickness with high precision. Profilometry: Mechanical or optical profilometry can measure the step height between a film and the substrate. Interferometry: Uses the interference patterns of light to determine film thickness. X-ray Reflectivity (XRR): Measures the film thickness by analyzing the reflected X-rays from the film surface.
