Microengineering employs various techniques for fabricating microscale structures. Key methods include:
Photolithography: A process used to transfer geometric patterns to a substrate. Etching: Used to remove layers from the surface to create intricate designs. Deposition Techniques: Such as chemical vapor deposition (CVD) and physical vapor deposition (PVD) to add material layers. Micro-molding: Involves creating a mold and then filling it with material to form a microscale object.