Several factors can lead to the formation of interface traps, including: - Defects and Imperfections: Imperfections in the crystal lattice or the presence of impurities can create localized energy states at the interface. - Oxidation and Oxide Quality: Poor quality oxides or improper oxidation processes can introduce traps. - Radiation and High-Field Stress: Exposure to radiation or high electric fields can generate traps over time.