What are the Limitations of Electron Beams in Nanotechnology?
Despite their advantages, electron beams also have some limitations. One significant drawback is the potential for beam-induced damage to sensitive materials, which can alter their properties and affect the accuracy of imaging or fabrication processes. Additionally, the equipment required for generating and manipulating electron beams, such as electron microscopes and EBL systems, is often expensive and requires specialized maintenance and operation skills.
