What are the Advantages of Electron Beam Lithography?
One of the primary advantages of EBL is its ability to achieve high resolution and accuracy, making it possible to create features as small as a few nanometers. This high resolution is critical for the development of advanced nanodevices and integrated circuits. Additionally, EBL offers flexibility in pattern design, allowing for complex and custom geometries, which are often challenging to achieve with other lithographic techniques.
