What are the Key Techniques in Nanotechnology for Chip Manufacturing?
Several advanced techniques are essential in the application of nanotechnology in chip manufacturing:
Lithography: This involves transferring patterns onto a substrate using light or electron beams. Extreme ultraviolet (EUV) lithography allows for the creation of finer patterns essential for nanoscale features. Etching: This process removes layers from the surface of the silicon wafer to create intricate patterns. Techniques like reactive ion etching (RIE) are critical for defining nanoscale features. Deposition: Various deposition methods, such as chemical vapor deposition (CVD) and atomic layer deposition (ALD), are used to add thin material layers with atomic precision.
