uv nano imprint lithography (uv nil)

How Does UV NIL Work?

The process of UV NIL involves several steps:
Mold Preparation: A mold with the desired nanoscale pattern is fabricated, often using electron beam lithography.
Resist Coating: A UV-sensitive resist is applied to the substrate.
Imprinting: The mold is pressed into the resist, creating a physical imprint.
UV Exposure: The assembly is exposed to UV light, curing the resist and solidifying the pattern.
Mold Removal: The mold is carefully removed, leaving the patterned resist on the substrate.

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