Fabricating NEMS poses several challenges due to the extremely small scale:
Material Limitations: Finding materials that exhibit desired mechanical and electrical properties at the nanoscale is difficult. Precision Manufacturing: Techniques such as electron-beam lithography and focused ion beam milling are required for precise fabrication, but these are expensive and time-consuming. Surface Effects: At the nanoscale, surface effects like adhesion and friction become more pronounced, affecting the performance and reliability of NEMS.