How does SPL compare to other nanolithography techniques?
Compared to traditional lithography methods like photolithography, SPL offers higher resolution but lower throughput. SPL provides more flexibility in material choice and pattern complexity than EBL but is generally slower and more expensive. Techniques like nanoimprint lithography can produce high-resolution patterns over large areas but lack the same level of control and versatility that SPL offers. Thus, SPL is often used for research and prototyping rather than mass production.
