NEMS typically consist of the following key components:
Nano-actuators: Devices that convert electrical signals into mechanical movement on a nanoscale. Nano-sensors: Devices that detect physical quantities such as force, pressure, or displacement at the nanoscale. Resonators: Components that oscillate at specific frequencies, crucial for applications in signal processing and sensing. Nano-cantilevers: Tiny beams anchored at one end, used in multiple applications including atomic force microscopy.
