Several strategies can be employed to minimize beam induced damage:
1. Lowering Beam Energy: Using lower energy beams reduces the displacement cross-section, thereby minimizing damage. 2. Cryogenic Techniques: Cooling the sample can reduce diffusion of defects and anneal out damage. 3. Protective Coatings: Applying a thin protective layer can absorb some of the beam energy. 4. Dose Management: Limiting the exposure time or dose can help in reducing the accumulation of damage.
