Achieving UHV requires a combination of techniques and equipment. The process typically involves: 1. Initial Pump Down: Using rotary vane pumps or scroll pumps to bring the pressure down to the millitorr range. 2. High Vacuum Pumps: Employing turbomolecular pumps or diffusion pumps to further reduce the pressure. 3. Getter Pumps: Utilizing non-evaporable getters (NEGs) or ion pumps to remove residual gases. 4. Baking: Heating the vacuum chamber to outgas the materials and surfaces inside, thus removing adsorbed gases. 5. Leak Detection: Ensuring the system is leak-tight using techniques like helium leak detection.
