Several techniques are used to measure surface uniformity, including:
Atomic Force Microscopy (AFM): AFM provides high-resolution images of surfaces at the nanometer scale, enabling the detailed analysis of surface roughness and uniformity. Scanning Electron Microscopy (SEM): SEM offers detailed surface morphology images, useful for assessing uniformity over larger areas compared to AFM. X-ray Reflectivity (XRR): XRR can measure the thickness and density of thin films, providing insights into their uniformity. Ellipsometry: This optical technique measures the thickness and optical properties of thin films, which can be correlated with surface uniformity.
