Beam profile measurement is typically performed using specialized detectors and imaging systems. Common techniques include:
Beam Profilers: These devices use CCD or CMOS sensors to capture the beam's cross-sectional intensity distribution. Knife-Edge Method: This technique involves moving a sharp edge through the beam and measuring the transmitted intensity. Scintillator Screens: These screens emit light when struck by a beam, allowing the beam profile to be imaged using a camera.
Accurate measurement is essential for calibrating and optimizing beam-based nanotechnology processes.