How Does EUVL Compare to Other Lithography Techniques?
Compared to traditional DUV lithography, EUVL offers significantly higher resolution due to its shorter wavelength. This allows for the creation of smaller features and tighter packing of transistors, which is crucial for advancing semiconductor technology. However, the complexity and cost associated with EUVL are higher, making it more suitable for high-volume manufacturing of advanced devices where the benefits outweigh the costs.
