The working principles of mechanical gauges vary depending on the type:
AFM: Uses a cantilever with a sharp tip that interacts with the surface of the sample. The deflection of the cantilever is measured using a laser beam, providing high-resolution topographical data. Nanoindentation: Involves pressing a hard, sharp indenter into the surface of the material. The depth of penetration and the force applied are recorded to determine mechanical properties. MEMS Gauges: Use microfabricated mechanical structures that deform under applied forces. The deformation is measured using various transduction methods, such as capacitive or piezoresistive sensing. Piezoelectric Gauges: Utilize piezoelectric materials that generate an electric charge in response to mechanical stress, allowing for precise force and displacement measurements.