In the context of nanofabrication, liquefied gases are used in several ways:
- Chemical Vapor Deposition (CVD): Liquefied gases like ammonia and methane are often used as precursors in CVD processes to deposit thin films and nanostructures. - Etching: Liquefied gases such as chlorine and fluorine-based compounds are used in plasma etching to create intricate nanoscale patterns on substrates. - Cooling and Stabilization: Liquefied gases like liquid nitrogen are used to cool down substrates and stabilize sensitive nanomaterials during fabrication.
