The importance of nanocomposite resists lies in their ability to meet the stringent demands of modern nanofabrication techniques. As device dimensions continue to shrink, traditional resists struggle to achieve the necessary resolution and stability. Nanocomposite resists offer several advantages: - Enhanced resolution: The presence of nanoparticles helps achieve smaller feature sizes with greater accuracy. - Improved etch resistance: Nanocomposite resists can withstand harsh etching processes better than conventional resists. - Mechanical strength: The addition of nanoparticles improves the mechanical properties, reducing defects during patterning.
