The performance of nanocomposite resists depends on the properties of both the polymer matrix and the embedded nanoparticles. The polymer provides the base material that responds to the lithographic process, while the nanoparticles enhance specific properties. The key factors influencing the behavior of nanocomposite resists include: - Nanoparticle size and distribution: Uniformly distributed nanoparticles lead to better performance and more consistent patterning results. - Polymer-nanoparticle interaction: Strong interactions between the polymer and nanoparticles enhance the overall stability and functionality of the resist. - Loading concentration: The amount of nanoparticles within the polymer matrix must be optimized to balance enhanced properties with processability.
