Several advanced tools and techniques are employed for inspecting nanomaterials and nanodevices:
- Scanning Electron Microscopy (SEM): Used for high-resolution imaging. - Atomic Force Microscopy (AFM): Provides detailed surface topography. - X-ray Diffraction (XRD): Used for chemical composition analysis. - Spectroscopy: Various forms, including Raman and UV-Vis, for chemical and physical analysis. - Nanoindentation: Measures mechanical properties like hardness and elasticity.