The choice of materials is crucial for the performance and reliability of thermal microvalves. Commonly used materials include:
Shape-Memory Alloys: These materials can return to their original shape after being deformed, making them ideal for thermal actuation. Polymers: Polymers like PDMS (Polydimethylsiloxane) are often used due to their flexibility and ease of fabrication. Bimetallic Strips: These consist of two metals with different coefficients of thermal expansion, which bend when heated. Silicon: Due to its excellent thermal properties and compatibility with microfabrication techniques, silicon is frequently used in microvalves.
