Thermal microvalves operate based on the principle of thermal expansion and contraction. When a specific material is heated, it expands, and when it cools, it contracts. This thermal actuation mechanism is often implemented using materials like shape-memory alloys, polymers, or bimetallic strips.
In a typical thermal microvalve, a heating element such as a microheater is incorporated to induce thermal expansion. The expansion force then actuates the valve, either opening or closing the fluid pathway. The process is reversible, allowing the valve to return to its original state when the temperature is reduced.
