The choice of materials is crucial in the design and functionality of NEMS. Some of the commonly used materials include:
- Silicon: Widely used due to its well-understood properties and compatibility with existing semiconductor manufacturing processes. - Carbon Nanotubes: Known for their exceptional mechanical strength and electrical conductivity. - Graphene: Offers high mechanical strength, flexibility, and excellent electrical properties. - Piezoelectric Materials: Such as zinc oxide and lead zirconate titanate, which can generate an electrical charge in response to mechanical stress.
