Deep Level Transient Spectroscopy (DLTS) is a powerful analytical technique used to identify and characterize deep-level defects in semiconductors. These defects can significantly affect the electrical properties of semiconductor materials, which are crucial for the performance of nanodevices and nanomaterials. DLTS measures the transient capacitance of a semiconductor device as a function of temperature and time, providing insights into the energy levels, capture cross-sections, and concentrations of defects.
