What Challenges Exist in Monolithic 3D Integration?
Despite its many advantages, monolithic 3D integration faces several challenges:
Thermal management: Managing heat dissipation in high-density multilayer structures remains a critical issue. Alignment precision: Achieving precise alignment of multiple layers is technically demanding. Material compatibility: Ensuring compatibility between different layers and materials is essential for device reliability. Process integration: Integrating various fabrication steps into a seamless process flow can be complex.
