What are the Techniques Used in Nano Scale Fabrication?
Several techniques are employed in nano scale fabrication, each with its own advantages and limitations. Some of the most common methods include:
- Photolithography: This technique uses light to transfer a geometric pattern from a photomask to a light-sensitive chemical photoresist on the substrate. - Electron Beam Lithography (EBL): EBL uses focused beams of electrons to create extremely fine patterns, enabling the fabrication of features smaller than what is possible with photolithography. - Nanoimprint Lithography (NIL): Involves pressing a mold with nanoscale features into a polymer film, creating a pattern through mechanical deformation. - Atomic Layer Deposition (ALD): A thin film deposition technique that allows for the precise control of layer thickness at the atomic level. - Self-Assembly: Utilizes the natural tendency of molecules to arrange themselves into structured patterns, driven by intermolecular forces.
