adaptive etching processes

What are the Key Techniques in Adaptive Etching?

Several techniques are commonly used in adaptive etching, including:
Reactive Ion Etching (RIE): This technique uses a plasma of reactive gases to etch material anisotropically, providing high precision in the etching process.
Plasma Etching: Involves the use of plasma to remove material isotropically or anisotropically. It is often used for etching polymers and other materials.
Wet Chemical Etching: Utilizes chemical solutions to selectively dissolve materials. It can be highly selective but less precise compared to dry etching methods.

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