What are the key parameters measured by X-Ray Reflectometry?
The principal parameters measured by XRR include:
Thickness: The technique can accurately measure the thickness of films down to a few nanometers. Density: Variations in electron density can be detected, providing information about the material composition. Roughness: Surface and interfacial roughness can be quantified, which is essential for understanding film quality and performance. Interface Quality: The sharpness of interfaces between different layers can be assessed, which is critical for multilayer structures.
