What are the Implications of LER on Device Performance?
LER can have profound effects on the performance of nanoscale devices. For instance, in Field Effect Transistors (FETs), LER can lead to variability in the gate length, which in turn affects the threshold voltage and drive current. This variability can cause inconsistencies in device operation, leading to reduced yield and reliability. In photonic devices, LER can scatter light, reducing the efficiency and performance of the device.
