silicon precursors

What are the Common Types of Silicon Precursors?

Several silicon precursors are commonly used in nanotechnology applications:
Silane (SiH4): A gas at room temperature, extensively used in CVD processes to deposit silicon films.
Tetraethyl orthosilicate (TEOS): A liquid precursor used in sol-gel processes to create silicon dioxide (SiO2) nanostructures.
Silicon Tetrachloride (SiCl4): Typically used in the production of optical fibers and silicon-based nanomaterials.

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