What are the Challenges in Semiconductor Inspection at the Nanoscale?
Despite the advancements, several challenges persist in semiconductor inspection at the nanoscale:
Resolution Limitations: Achieving the required resolution to detect nanodefects is technically demanding. Throughput: High-resolution techniques often have low throughput, making large-scale inspections time-consuming. Cost: Advanced inspection tools and methods can be prohibitively expensive. Data Handling: The volume of data generated during nanoscale inspections can be overwhelming and requires sophisticated processing and storage solutions.
