What are the Challenges in Monitoring Nanoprocesses?
The primary challenges include:
- Resolution and Sensitivity: Achieving the necessary resolution to observe nanoscale features and the sensitivity to detect minute changes. - Interference and Noise: Minimizing external interference and noise that can affect measurement accuracy. - Integration with Fabrication: Developing monitoring techniques that can be seamlessly integrated into fabrication processes without disrupting them. - Data Analysis: Handling and interpreting large volumes of complex data generated by advanced monitoring techniques.
