Despite the promising applications, there are several challenges in MEMS nanotechnology:
1. Fabrication: Creating MEMS devices at the nanoscale requires advanced nanofabrication techniques. These methods must be precise and reliable to ensure the functionality of the devices. 2. Integration: Integrating MEMS with other nanoscale systems and materials is complex. The compatibility of different materials and the interaction between electrical and mechanical components must be carefully managed. 3. Reliability: Nanoscale devices are susceptible to environmental factors such as temperature and humidity. Ensuring the long-term reliability of MEMS devices in various conditions is a significant challenge.
