Despite their advantages, MEMS-based pumps face certain challenges:
1. Fabrication Complexity: The microfabrication process can be intricate and costly. 2. Reliability: Ensuring long-term reliability and performance consistency is crucial, especially for medical applications. 3. Fluid Compatibility: Some fluids may interact with the materials used in MEMS pumps, affecting their performance and durability. 4. Integration: Incorporating MEMS pumps into larger systems requires meticulous design and testing to ensure compatibility and functionality.