What are the Challenges in Integrating MEMS with Nanotechnology?
Despite the promising advantages, several challenges exist in the integration of MEMS with nanotechnology:
Fabrication Complexity: The precise fabrication of nanoscale components requires advanced techniques, which can be complex and costly. Material Limitations: Finding suitable materials that can function effectively at the nanoscale while being compatible with MEMS fabrication processes is a significant hurdle. Reliability and Durability: Ensuring the long-term reliability and durability of MEMS devices integrated with nanotechnology is a critical challenge that needs to be addressed.