Despite its advantages, CD-SEM also presents several challenges:
Sample preparation: Ensuring that the sample surface is clean and free of contaminants can be difficult. Beam damage: The electron beam can sometimes damage sensitive samples, especially organic materials. Resolution limits: While CD-SEM offers high resolution, it may not be sufficient for extremely small features below a few nanometers. Cost: The equipment and maintenance costs for CD-SEM can be high, limiting its accessibility for some research and industrial applications.
