critical dimension scanning electron microscopy

What are the Alternatives to CD-SEM?

There are several alternative techniques to CD-SEM for measuring nanoscale features, each with its own advantages and limitations:
Atomic Force Microscopy (AFM): Provides high-resolution, three-dimensional surface profiles but can be slower and more challenging to interpret.
Transmission Electron Microscopy (TEM): Offers extremely high resolution but requires more complex sample preparation.
Optical Microscopy: Limited by diffraction but useful for larger nanoscale features when combined with techniques like super-resolution microscopy.

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